1 | Model | JD-1200 |
2 | Product Name | Mono-crystal Furnace |
3 | Power Voltage | 380V |
4 | Power Frequency | 50Hz |
5 | Heating Method and Heating System | Resistivity Heating and Graphite Heater |
6 | Main Heater Maximum Power | 165KW |
7 | Main Heater Maximum Heater Voltage/current | 55V/3000A |
8 | Auxiliary Heater Maximum Power | 60KW |
9 | Auxiliary Heater Maximum Heater Voltage/current | 50V/1200A |
10 | Whole Power Supply | ≤240KW |
11 | Maximum Temperature inside Main Chamber | 1600℃ |
12 | Vacuum Level at Normal Condition | ﹤3Pa |
13 | Diameter Range of Ingot | ≤10″ |
14 | Capacity Volume | Max 370kg |
15 | Raw Material | Poly-silicon Material |
16 | Dimension of Main Chamber | Ф1200×1400mm |
17 | Rotary Valve Size | ¢360 |
18 | Size of Pulling Chamber and Operation Chamber | ¢360×4600mm |
19 | Seed Pull Speed Range | 0.1～10mm/min |
20 | Seed Jog Speed | ≥500mm/min |
21 | Seed Rotation Speed Range | 2～30rmp |
22 | Crucible Lift Rate | 0.02～1mm/min |
23 | Crucible Rotation Speed Range | 1～30rpm |
24 | Total Seed Travel Inside Pulling Chamber | ≥4000mm |
25 | Total Height of Main Furnace | 10242mm |
26 | Footprint of Main Furnace | 2518mm×1700mm |
27 | Occupied Area of Whole Furnace | 5500mm×6500mm |
28 | Requirement of Inflow (Pressure) | Max 0.40Mpa Pressure ifference0.2Mpa |
29 | Cooling Water Consumption / Run | ≥25 m3/h |
30 | Cooling Water Inlet Water Temperature | 25-28℃ |
31 | Argon Amount / Run | 0.3Mpa~0.7Mpa≈110L/min |
