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 JD-1600 Mono-Crystal Furnace is a flexible shaft lifting-pulling type mono-crystal furnace. It is a device used in the inert gas atmosphere using the graphite resistance heater to melt certain silicon materials for growing dislocation- free mono crystals by the Czochralski method. It can produce high-quality silicon mono-crystal required by large-scaled integrated circuits. This equipment can use 30-40inch hot-zone system with maximum charging of 1000KG to grow mono-crystals of 12inch or less. Its adaptable for  210 wafer and the capacity is much improved.The equipment has the technical characteristics of the original JD series mono crystal furnace and belongs to the advanced automatic furnace type. With perfect automatic fusion function, it can realize automatic control from heating to finishing. The appearance design, maintenance convenience, degree of automation and various performance indicators in the industry are in a leading position.


1

Model

JD-1600

2

Product Name

Mono-crystal Furnace

3

Power Voltage

380V

4

Power Frequency

50Hz

5

Heating Method and Heating System

Resistivity Heating and Graphite Heater

6

Main Heater Maximum Power

165KVA

7

Main Heater Maximum Heater Voltage/Current               

55v/3000A

8

Auxiliary Heater Maximum Power

100KW

9

Auxiliary Heater Maximum Heater Voltage/Current

55v/2000A

10

Whole Power Supply

≤290KW

11

Maximum Temperature inside Main Chamber

1700

12

Vacuum Level at Normal Condition

2Pa

13

Diameter Range of Ingot

φ8—φ12

14

Capacity Volume

1000kg

15

Raw Material

Poly-silicon Material

16

Seed Pull Speed Range

0.110mm/min

17

Seed Rotation Speed Range

030 rmp

18

Crucible Lift Rate

0.051mm/min

19

Crucible Rotation Speed Range

030rpm

20

Total Seed Travel Inside Pulling Chamber

6600mm

21

Total Height of Main Furnace

12500mm

22

Occupied Area of Whole Furnace

2800mm×1900mm

23

Requirement of Inflow (Pressure)                        

Pressure: Maximum 0.45Mpa



Pressure Differential:0.25Mpa

24

Cooling Water Consumption / Run

25 m3/h

25

Cooling Water Inlet Water Temperature

30




 

 

 


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