JD-1600 Mono-Crystal Furnace is a flexible shaft lifting-pulling type mono-crystal furnace. It is a device used in the inert gas atmosphere using the graphite resistance heater to melt certain silicon materials for growing dislocation- free mono crystals by the Czochralski method. It can produce high-quality silicon mono-crystal required by large-scaled integrated circuits. This equipment can use 30-40inch hot-zone system with maximum charging of 1000KG to grow mono-crystals of 12inch or less. It’s adaptable for “ 210 wafer” and the capacity is much improved.The equipment has the technical characteristics of the original JD series mono crystal furnace and belongs to the advanced automatic furnace type. With perfect automatic fusion function, it can realize automatic control from heating to finishing. The appearance design, maintenance convenience, degree of automation and various performance indicators in the industry are in a leading position.
1 | Model | JD-1600 |
2 | Product Name | Mono-crystal Furnace |
3 | Power Voltage | 380V |
4 | Power Frequency | 50Hz |
5 | Heating Method and Heating System | Resistivity Heating and Graphite Heater |
6 | Main Heater Maximum Power | 165KVA |
7 | Main Heater Maximum Heater Voltage/Current | 55v/3000A |
8 | Auxiliary Heater Maximum Power | 100KW |
9 | Auxiliary Heater Maximum Heater Voltage/Current | 55v/2000A |
10 | Whole Power Supply | ≤290KW |
11 | Maximum Temperature inside Main Chamber | 1700℃ |
12 | Vacuum Level at Normal Condition | ﹤2Pa |
13 | Diameter Range of Ingot | φ8”—φ12” |
14 | Capacity Volume | 1000kg |
15 | Raw Material | Poly-silicon Material |
16 | Seed Pull Speed Range | 0.1~10mm/min |
17 | Seed Rotation Speed Range | 0~30 rmp |
18 | Crucible Lift Rate | 0.05~1mm/min |
19 | Crucible Rotation Speed Range | 0~30rpm |
20 | Total Seed Travel Inside Pulling Chamber | 6600mm |
21 | Total Height of Main Furnace | 12500mm |
22 | Occupied Area of Whole Furnace | 2800mm×1900mm |
23 | Requirement of Inflow (Pressure) | Pressure: Maximum 0.45Mpa |
Pressure Differential:0.25Mpa | ||
24 | Cooling Water Consumption / Run | 25 m3/h |
25 | Cooling Water Inlet Water Temperature | ≤30℃ |