JQ-900 is a kind of large-scale float-zone monocrystalline silicon furnace with the characteristic of high-reliability, high-precision and high- automation which integrates optic, mechanic and electronic together. The performance of the equipment has reached the international advanced level of similar products. It mainly produces large scale FZ monocrystalline silicon of 6-8 inch. The maximum length of the FZ monocrystalline silicon is 2500mm and the highest purity is 99.99999999%.The FZ monocrystalline silicon wafers are available for the sophisticated fields such as IGBT, SCR, infrared detector, aerospace and navigation. Furthermore, with the high photoelectric conversion efficiency of 23%, we can attempt boldly to use it on the photovoltaic industry.
1. | Main Chamber | Inner Chamber Diameter[mm] | Φ902X1190H |
2 | Upper Vice Chamber | Chamber Diameter[mm] | Φ500 X1800H |
3 | Lower Vice Chamber | Chamber Diameter[mm] | Φ500 X2500H |
4 | Upper Transmission | Travel[mm] | 2000 |
Main Shaft Rotation[rpm] | 0-30±1% |
Main Shaft Diameter[mm] | 100 |
5 | Lower Transmission | Main Shaft Travel[mm] | 2600 |
Main Shaft Rotation[rpm] | 0-30±1% |
Main Shaft Diameter[mm] | 100 |
Inner Shaft Travel[mm] | 340 |
6 | Translation Component | Travel[mm] | ±25 |
7 | Slot Component | Travel[mm] | 530 |
8 | Reflection Ring | Travel[mm] | 50 |
Quick Travel Speed[mm/min] | 20 |
9 | Preheating Ring Component | Travel[mm] | 285 |
Quick Travel Speed[mm/min] | 100 |
10 | Required Area of Grower | L × W × H [mm] | 6600X4200X14000 |
11 | Vaccum System | Vaccum Degree(mbar) | ≤0.01 |
12 | Air Circuit System | Intake Pressure[Ba] | 5-12（Recommend 10） |
Phase Flow[L/min] | 50 |
Gas Quality | C57-0305，Degree 4.8 |
13 | Cooling System | Intake Pressure[Ba] | 4-6 |
Intake Temperature[°C] | 12-25 |
Intake Flow[L/min] | 200 |
Physical Cleanliness[mm] | 0.38 |
14 | Electrical Related | Power Frequency[Hz] | 50或60 |
Power Voltage[VAc] | 3X380 |
Generator Output Power(kW) | 120KW |
Control Power Supply(Hz) | 50或60 |
Power Voltage[VAc] | 3X380 |
Power | 10KW |
Curernt Input rectifier filter | yes |
Control System | Siemens S7-300 |
Human-Computer Interface Control | Pro-face Touch Panel |
CCD Monitoring System | KEYENCE |
Upper and lower transmission drives | Lenze Drive |
