| 项 目 (Item) | 标 准 (Spec) |
| 电学性能 electronic characters |
| 导电类型(type) | P型(B dopant) | N型(P dopant) |
| 电阻率(resistivity annealed)(Ω·cm) | 1.0~3.0 | 0.2~2.0;0.8~5;1~15;(custom as required) |
| 电阻率不均匀性(inhomogeneity of resistivity) | ≤15% | ≤25% |
| 硅片少子寿命(lifetime)(μs) | ≥10.0 | ≥500.0 |
| 氧含量(oxygen)(ppma) | ≤20 |
| 碳含量(carbon)(ppma) | ≤1 |
| 晶体结构 crystal structure |
| 晶向(orientation) | o |
| 缺陷(swirl and OSF-ring) | 无(none) |
| 位错密度(dislocation density)(cm-2) | ≤3000 |
| 表面质量 appearance |
| 硅落、V缺口、孪晶、裂纹、沾污、针孔 (crack, V-shape,twin, stain,pinhole) | 无(none) |
| 崩边(edge chips)(mm) | ≤0.5*0.3, no more than 2/wafer |
| 线痕(saw marks)(μm) | ≤15.0 |
| 弯曲度(bow)(μm ) | ≤50.0 |
| 翘曲度(warp)(μm ) | ≤50.0 |
| 硅片尺寸 dimension |
| 边长&直径(length and diameter)(mm) | 156.75 | 210 |
| 硅片厚度(thickness)(μm) | 180 | 200 |
| TV(μm) | 200 | ±15.0 |
| 180 | ±15.0 |
| TTV(μm) | 200 | 30 |
| 180 | 25 |
| 直线段的垂直度(verticality of side) | 90o±0.3o |
| 包装与储运 package and carriage |
| 包装(package) | 1盒400片;1箱1600片;1托48000片。 |
| 400pcs/box,1600pcs/case,48Kpcs/pallet |
| 储存(Storage) | 温度(temperature.):10℃~40℃ |
| 湿度(humidity):≤60% |